Product make : KLA Tenco

      Company Name : KLA Tenco

 Model : Zeta 20 

v Step height: 3D step height from nm to mm 

v Texture: 3D roughness and waviness 

v Form: 3D bow and shape

v Stress: 2D thin film stress 

v Film thickness: film thickness from 30nm to 100µm 

v Defect inspection: capture defects greater than 1µm